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Semiconductor Manufacturing Systems

LSI is often metaphorically described as the body cell of computer and mobile multimedia devices which people desire to be smaller and faster.
Hitachi Kokusai Electric is supporting LSI's never ending innovation by providing worldwide class leading technologies of deposition and thermal film manufacturing equipment.

Batch Processing System

Hitachi Kokusai's unique thermal technologies enable its batch processing system to offer the lowest cycle time with the largest batch size and highest process performance

Single Wafer Processing System

Hitachi Kokusai's Plasma Nitridation/Oxidation system, MARORA and Resist Dry Strip System, TΛNDUO support stringent new process technology requirements for advanced memory and logic devices

Group Company Products

Sheet Resistance Measurement Systems (4 Point Probe ), Batch Thermal Process Systems and Batch Dry Strip Systems are offered by group companies

  • Sheet Resistance Measurement Equipment
  • Batch Thermal Process System for 150mmWafers
  • Batch Dry Strip System
Service Support

We offer total solutions that cover, Installation, Refurbishment (restoration), Overhaul, Maintenance, Retrofit and Relocation

Training Center

A variety of training courses are offered to support the most effective and efficient maintenance and operation of our systems