ZESTONE-VII(B) DJ-1207S Hitachi Kokusai Electric developed Zestone-VII series single wafer Diffusion/LPCVD systems for processing 300 mm wafer. The Zestone VII series offers our customers who have moved to a single wafer configuration the expertise in thermal processing and low cost of ownership (CoO) that is expected from Hitachi Kokusai products. The combination of chamber size and Hitachi Kokusai's controllers allows for excellence in specialty processes for DRAM applications requiring selective HSG, TaO5, PH3-Anneals. Hitachi Kokusai has offered single-wafer thermal solutions since 1994 where they are currently being utilized for R&D, prototype and mass production lines of semiconductor devices in the twenty first century.

Specifications
	ZESTONE-VII(B) Wafer Diameter(mm) 300 Temperature Stability () <0.5 Cassette Type FOUP(for 13 or 25 wafers) Number of Cassette I/O 2 Tube Controller CX-3000(Color TFT) Dimensions(W×D×H)(mm) 2000×3000×2800
Process Applications
	Selective HSG, PH3-Anneal, Doped/Undoped-Poly-Si, Doped/Undoped-SiGe-Poly, Si3N4, (New film processes are under development.)
Main Features
	Substantially reduced thermal budget comparing to conventional vertical batch systems Reduced cycle time Supports formation of Hi-k dielectric films for DRAM capacitor and logic gate dielectric Integrated processing for gates stack and DRAM capacitor formation Excellent yield and film thickness uniformity by optimized process conditions and clean air flow in loading area of the system. Native oxide free process by oxygen and moisture free load lock. Improved throughput with dual wafer processing. Maximum system uptime by self-cleaning capability. Simple structure for easy maintenance (a reactor chamber can be easily and safely inserted and extracted) SEMI standard compliant wafer I/O stage Supports FOUP type cassettes User friendly GUI tube controller (CX3000 series) which supports process logging data analysis capability. SECS/GEM compatibility for factory automation.
Typical Process Performance
* ZESTONE is a registered trademark of Hitachi Kokusai Electric Inc.