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Semiconductor Manufacturing Systems

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Semiconductor System

 
 
 
300mm Single Wafer LPCVD System ZESTONE-VII(B) (DJ-1207S)
 
 
200mm Vertical Diffusion/LPCVD Systems VERTRON-III(F3) (DD/DJ-823V),VERTRON-III(J3) (DD/DJ853V),VERTRON-III(G) (DD/DJ833V)
 
200mm Load Lock Vertical Diffusion/LPCVD Systems VERTRON-V(SS) (DD/DJ-855V), VERTRON-V(S2) (DD-835V/DJ-853V)
 
 
Silicon Epitaxial Growth System DC-7000/DC-9000 Series
 
 
Block Control System CX-9600 Series
 
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Semiconductor Manufacturing Systems
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Semiconductor System
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300mm Single Wafer LPCVD System

200mm Vertical Diffusion/LPCVD Systems

200mm Load Lock Vertical Diffusion/LPCVD Systems

Silicon Epitaxial Growth System
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Block Control System

Toyama Works

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