CX-9600 Series

The CX-9600 series Block Control System is a set of mini-computers developed to regulate operations between of a number of semiconductor manufacturing systems. The operations regulated include automating an entire production line or con trolling certain systems within the line. The CX-9600 series can be connected with a CIM system through a host computer. Customers have experienced improved temperature ramp-up, reduced cycle times, and easier maintenance control by linking the CX-9600 series Block Control System to their vertical diffusion/CVD systems.

Specifications

	CX-9620
monitor	coler CRT (17 inch)
operation	mouse and key board
auxiliary storage	HDD (2GB)
extemal storage	DAT or MO (option)
equipment contorol	max 32 furnace
x-terminal	max 3 terminals
alarm history	400 data / system
event data report	500 batches / system
point data report	500 batches / system
trace data report	50 batches / system

Benefits and features


	Host link capabilities SECS-I , II compliant Supports GEM, HSMS applications and user individual spec Data management capabilities Automatic Data Collection Graphic display of system status Full spectrum of data displayed: operation, maintenance, alarm, event, point, trace, etc. Back-up/restore function for data Recipe edit and maintenance schedule control function Up-time rate calculation function Statistical calculation of processing data (optional)

CX-9600 Series

Specifications

Benefits and features