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Single Wafer Plasma Nitridation System MARORA

Batch Type Atomic Layer Deposition Process Tool ALDINNA

Vertical Diffusion/LPCVD System QUIXACE(Pronounce quick ace)

Load Lock Vertical Diffusion/LPCVD System QUIXACE-L/L

High Temperature Anneal Processing Tool ZESTONE-III

Batch Epi Si/SiGe System
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Plasma Dry Strip System(λ-300)
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